Author:
Hongo C.,Tomita M.,Takenaka M.,Suzuki M.,Murakoshi A.
Cited by
10 articles.
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1. New sample preparation method using room-temperature direct bonding in backside SIMS analysis;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2016-05
2. Surface and Interface Characterization;Springer Handbook of Metrology and Testing;2011
3. Evaluation of Hydrogen in Tantalum Thin Films Using Secondary Ion Mass Spectrometry;Japanese Journal of Applied Physics;2008-01-22
4. Back side SIMS analysis of hafnium silicate;Applied Surface Science;2006-07
5. Surface and Interface Characterization;Springer Handbook of Materials Measurement Methods;2006