1. Damage formation and annealing of ion implantation in Si;Materials Science Reports;1991-04
2. Ion Lithography and Focused Ion Beam Implantation;Handbook of Vlsi Microlithography;1991
3. Development of Liquid‐Metal‐Ion Sources for Focused‐Ion‐Beam Applications;Journal of The Electrochemical Society;1989-11-01
4. Focused phosphorus ion beam implantation into silicon;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1989-03
5. Critical problems of ion implantation in processing small geometry integrated devices;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1989-02