Author:
McCord Mark,Kojima Shinichi,Petric Paul,Brodie Alan,Sun Jeff
Subject
Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Process Chemistry and Technology,Instrumentation,Electronic, Optical and Magnetic Materials
Cited by
4 articles.
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1. Analytical formulae for trajectory displacement in electron beam and generalized slice method;Ultramicroscopy;2020-10
2. Statistical Coulomb interactions in multi-beam SEM;International Journal of Modern Physics A;2019-12-11
3. Pattern Generators for Reflective Electron-Beam Lithography (REBL);Advances in Imaging and Electron Physics;2015
4. Optical system for a multiple-beam scanning electron microscope;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2014-09