Rotary reactor for atomic layer deposition on large quantities of nanoparticles-Reference-Cited by-同舟云学术

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Rotary reactor for atomic layer deposition on large quantities of nanoparticles

Published:2007-01 Issue:1 Volume:25 Page:67-74
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

McCormick J. A.,Cloutier B. L.,Weimer A. W.,George S. M.

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.2393299

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