Residual stresses and fracture properties of magnetron sputtered Ti films on Si microelements-Reference-Cited by-同舟云学术

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Residual stresses and fracture properties of magnetron sputtered Ti films on Si microelements

Published:1993-05 Issue:3 Volume:11 Page:543-553
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Ljungcrantz H.,Hultman L.,Sundgren J.‐E.,Johansson S.,Kristensen N.,Schweitz J.‐Å.,Shute C. J.

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.578770

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