Auger electron spectroscopy study of semiconductor surfaces: Effect of cleaning in inert atmosphere-Reference-Cited by-同舟云学术

Auger electron spectroscopy study of semiconductor surfaces: Effect of cleaning in inert atmosphere

Published:2016-07 Issue:4 Volume:34 Page:041227
ISSN:2166-2746
Container-title:Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
language:en
Short-container-title:Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena

Author:

Debehets Jolien,Miranda Sérgio M. C.,Homm Pía,Houssa Michel,Seefeldt Marc,Locquet Jean-Pierre,Seo Jin Won

Publisher

American Vacuum Society

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Process Chemistry and Technology,Instrumentation,Electronic, Optical and Magnetic Materials

Link

http://avs.scitation.org/doi/pdf/10.1116/1.4955149

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