Argon–oxygen dc magnetron discharge plasma probed with ion acoustic waves
Author:
Publisher
American Vacuum Society
Subject
Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Link
http://avs.scitation.org/doi/pdf/10.1116/1.4871081
Cited by 5 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. The measurement and impact of negative oxygen ions during reactive sputter deposition;Critical Reviews in Solid State and Materials Sciences;2023-09-21
2. Effect of external magnetic field and dust grains on the properties of ion-acoustic waves;Journal of Plasma Physics;2023-09-12
3. Plasma under control: Advanced solutions and perspectives for plasma flux management in material treatment and nanosynthesis;Applied Physics Reviews;2017-12
4. Effect of hydrogen addition on the deposition of titanium nitride thin films in nitrogen added argon magnetron plasma;Journal of Physics D: Applied Physics;2016-05-04
5. Study on the effect of hydrogen addition on the variation of plasma parameters of argon-oxygen magnetron glow discharge for synthesis of TiO2 films;AIP Advances;2016-04
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