Standing and sitting adlayers in atomic layer deposition of ZnO-Reference-Cited by-同舟云学术

Standing and sitting adlayers in atomic layer deposition of ZnO

Published:2015-12-22 Issue:1 Volume:34 Page:01A143
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:J. Vac. Sci. Technol. A

Author:

Gao Zhengning¹,Wu Fei²,Myung Yoon²,Fei Ruixiang³,Kanjolia Ravindra⁴,Yang Li⁵,Banerjee Parag¹

Affiliation:

1. Department of Mechanical Engineering & Material Science, Washington University in St. Louis, Missouri 63130 and Institute of Materials Science & Engineering, Washington University in St. Louis, Missouri 63130

2. Department of Mechanical Engineering & Material Science, Washington University in St. Louis, Missouri 63130

3. Department of Physics, Washington University in St. Louis, Missouri 63130

4. SAFC Hitech, 1429 Hilldale Ave., Haverhill, Massachusetts 01832

5. Institute of Materials Science & Engineering, Washington University in St. Louis, Missouri 63130 and Department of Physics, Washington University in St. Louis, Missouri 63130

Funder

U.S. Army RDECOM

U.S. Department of Energy

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/am-pdf/10.1116/1.4938080

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