Lithium source for focused ion beam implantation and analysis-Reference-Cited by-同舟云学术

Lithium source for focused ion beam implantation and analysis

Published:2021-01 Issue:1 Volume:39 Page:012802
ISSN:2166-2746
Container-title:Journal of Vacuum Science & Technology B
language:en
Short-container-title:Journal of Vacuum Science & Technology B

Author:

Titze Michael¹^ORCID,Perry Daniel L.¹,Auden Elizabeth A.¹²,Pacheco Jose L.¹,Abraham John B. S.¹³,Bielejec Edward S.¹²³

Affiliation:

1. Sandia National Laboratories, Albuquerque, New Mexico 87185

2. Los Alamos National Laboratory, Los Alamos, New Mexico 87545

3. Johns Hopkins University Applied Physics Laboratory, Laurel, Maryland 20723

Funder

U.S. Department of Energy

Center for Integrated Nanotechnologies

Publisher

American Vacuum Society

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Process Chemistry and Technology,Instrumentation,Electronic, Optical and Magnetic Materials

Link

http://avs.scitation.org/doi/am-pdf/10.1116/6.0000645

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