Minimizing open-loop piezoactuator nonlinearity artifacts in atomic force microscope measurements
Author:
Affiliation:
1. Department of Electrical and Computer Engineering, Iowa State University, Ames, Iowa 50011
2. Department of Physics and Astronomy, Department of Electrical and Computer Engineering, Iowa State University, Ames, Iowa 50011
Funder
National Institute of General Medical Sciences (NIGMS)
Publisher
American Vacuum Society
Subject
Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Process Chemistry and Technology,Instrumentation,Electronic, Optical and Magnetic Materials
Link
http://avs.scitation.org/doi/pdf/10.1116/1.4994315
Cited by 2 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Methods for Surface Imaging and Combined Structural and Chemical Surface Analysis: Atomic Force Microscopy;Surface‐Functionalized Ceramics;2022-12-16
2. Hysteresis modeling of piezoelectric actuator using particle swarm optimization-based neural network;Proceedings of the Institution of Mechanical Engineers, Part C: Journal of Mechanical Engineering Science;2020-05-28
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