Iron CVD from iron pentacarbonyl: Growth inhibition by CO dissociation and use of ammonia to restore constant growth-Reference-Cited by-同舟云学术

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Iron CVD from iron pentacarbonyl: Growth inhibition by CO dissociation and use of ammonia to restore constant growth

Published:2016-09 Issue:5 Volume:34 Page:051518
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Zhang Pengyi¹,Mohimi Elham¹,Talukdar Tushar K.¹,Abelson John R.¹,Girolami Gregory S.²

Affiliation:

1. Department of Materials Science and Engineering, University of Illinois at Urbana-Champaign, 1304 W. Green St., Urbana, Illinois 61801

2. Department of Chemistry, University of Illinois at Urbana-Champaign, 600 South Mathews Avenue, Urbana, Illinois 61801

Funder

National Science Foundation (NSF)

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://scitation.aip.org/deliver/fulltext/avs/journal/jvsta/34/5/1.4961942.pdf?itemId=/content/avs/journal/jvsta/34/5/10.1116/1.4961942&mimeType=pdf&containerItemId=content/avs/journal/jvsta

Cited by 14 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Controlling electron beam induced deposition of iron from Fe(CO)5: Inhibition of autocatalytic growth by NH3 and reactivation by electron irradiation;Journal of Vacuum Science & Technology A;2023-04-13

2. The Importance of Decarbonylation Mechanisms in the Atomic Layer Deposition of High‐Quality Ru Films by Zero‐Oxidation State Ru(DMBD)(CO) ₃;Small;2022-01-05

3. (tBuN)SiMe2NMe2—A new N,N′-κ2-monoanionic ligand for atomic layer deposition precursors;Journal of Vacuum Science & Technology A;2021-05

4. Platinum ω-Alkenyl Compounds as Chemical Vapor Deposition Precursors: Synthesis and Characterization of Pt[CH2CMe2CH2CH═CH2]2 and the Impact of Ligand Design on the Deposition Process;Chemistry of Materials;2020-10-27

5. Direct MOCVD Growth of Iron Oxide on Three‐Dimensional Nickel Foam as Electrode for the Oxygen Evolution Reaction;ChemSusChem;2020-09-30

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