Two-step growth of β-Ga2O3 films on (100) diamond via low pressure chemical vapor deposition-Reference-Cited by-同舟云学术

Two-step growth of β-Ga2O3 films on (100) diamond via low pressure chemical vapor deposition

Published:2021-03 Issue:2 Volume:39 Page:023411
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A
language:en
Short-container-title:Journal of Vacuum Science & Technology A

Author:

Karim Md Rezaul¹^ORCID,Chen Zhaoying¹,Feng Zixuan¹,Huang Hsien-Lien²,Johnson Jared M.²^ORCID,Tadjer Marko J.³^ORCID,Hwang Jinwoo²^ORCID,Zhao Hongping¹²^ORCID

Affiliation:

1. Department of Electrical and Computer Engineering, The Ohio State University, Columbus, Ohio 43210

2. Department of Materials Science and Engineering, The Ohio State University, Columbus, Ohio 43210

3. U.S. Naval Research Laboratory, 4555 Overlook Ave SW, Washington, DC 20375

Funder

Air Force Office of Scientific Research

NSF

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

https://avs.scitation.org/doi/am-pdf/10.1116/6.0000854

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