Transparent conducting amorphous Zn–Sn–O films deposited by simultaneous dc sputtering-Reference-Cited by-同舟云学术

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Transparent conducting amorphous Zn–Sn–O films deposited by simultaneous dc sputtering

Published:2004-07 Issue:4 Volume:22 Page:1705-1710
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Moriga Toshihiro,Hayashi Yukako,Kondo Kumiko,Nishimura Yusuke,Murai Kei-ichiro,Nakabayashi Ichiro,Fukumoto Hidenori,Tominaga Kikuo

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.1765658

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