Atomic layer deposition of sodium fluoride thin films-Reference-Cited by-同舟云学术

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Atomic layer deposition of sodium fluoride thin films

Published:2021-05 Issue:3 Volume:39 Page:032405
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A
language:en
Short-container-title:Journal of Vacuum Science & Technology A

Author:

Kuraitis Sara¹^ORCID,Kang Donghyeon²^ORCID,Mane Anil U.²,Zhou Hua³^ORCID,Soares Jake¹,Elam Jeffrey W.²,Graugnard Elton¹^ORCID

Affiliation:

1. Micron School of Materials Science and Engineering, Boise State University, 1910 University Dr., Boise, Idaho 83725

2. Applied Materials Division, Argonne National Laboratory, 9700 S. Cass Ave., Argonne, Illinois 60439

3. X-ray Science Division, Advanced Photon Source, Argonne National Laboratory, Lemont, Illinois 60439

Funder

U.S. Department of Energy

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

https://avs.scitation.org/doi/am-pdf/10.1116/6.0000847

Cited by 6 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Experimental observation of two-dimensional phase in compressed FeF2;Applied Physics Letters;2024-01-01

2. Towards understanding the first half-ALD cycle of Ag growth: adsorption and dissociation of silver(i) acetamidinates on the Ag(110) surface;Physical Chemistry Chemical Physics;2024

3. Electrocatalysis of Fe‐N‐C Bonds Driving Reliable Interphase and Fast Kinetics for Phosphorus Anode in Sodium‐Ion Batteries;Advanced Functional Materials;2023-07-12

4. Sodium β-Diketonate Glyme Adducts as Precursors for Fluoride Phases: Synthesis, Characterization and Functional Validation;Molecules;2022-09-23

5. Low temperature plasma-enhanced atomic layer deposition of sodium phosphorus oxynitride with tunable nitrogen content;Journal of Vacuum Science & Technology A;2022-05

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