SiC emitters for nanoscale vacuum electronics: A systematic study of cathode–anode gap by focused ion beam etching-Reference-Cited by-同舟云学术

SiC emitters for nanoscale vacuum electronics: A systematic study of cathode–anode gap by focused ion beam etching

Published:2017-05 Issue:3 Volume:35 Page:031801
ISSN:2166-2746
Container-title:Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
language:en
Short-container-title:Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena

Author:

Liu Meng¹,Li Tie¹,Wang Yuelin¹

Affiliation:

1. Science and Technology on Micro-system Laboratory, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences Shanghai 200050, China; School of Information Science and Technology, University of ShanghaiTech, Shanghai 200120, China; and School of Microelectronics, University of Chinese Academy of Sciences, Beijing 100049, China

Publisher

American Vacuum Society

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Process Chemistry and Technology,Instrumentation,Electronic, Optical and Magnetic Materials

Link

http://avs.scitation.org/doi/pdf/10.1116/1.4979049

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