Characterization of electron cyclotron resonance hydrogen plasmas-Reference-Cited by-同舟云学术

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Characterization of electron cyclotron resonance hydrogen plasmas

Published:1991-05 Issue:3 Volume:9 Page:717-721
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Outten C. A.,Barbour J. C.,Wampler W. R.

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.577350

Cited by 33 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

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2. Sheet Plasma Excitation by a 2.45 GHz Microwave Power Introduced through a Local Gas Injection Type Dielectric Window;Plasma and Fusion Research;2020-03-13

3. Correlation of III/V semiconductor etch results with physical parameters of high-density reactive plasmas excited by electron cyclotron resonance;Plasma Science and Technology;2017-10-24

4. Effect of Microwave Power on Electron Temperature and Electron Density in Deuterium Plasma Generated by Electron Cyclotron Resonance;IEEE Transactions on Plasma Science;2016-01

5. Characteristics of 2.45GHz Microwave Plasma by Langmuir Probe Measurements;Solid State Phenomena;2007-06

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