Sheet Plasma Excitation by a 2.45 GHz Microwave Power Introduced through a Local Gas Injection Type Dielectric Window
Author:
Affiliation:
1. Graduate School of Science and Engineering, Doshisha University
Publisher
Japan Society of Plasma Science and Nuclear Fusion Research
Subject
Condensed Matter Physics
Link
https://www.jstage.jst.go.jp/article/pfr/15/0/15_1401005/_pdf
Reference12 articles.
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4. [4] H.J. Woo, K.S. Chung, M.J. Lee and T. Lho, Phys. Plasmas 16, 023505 (2009).
5. [5] M. Yoshida and K. Kajinishi, IEEE Trans. Plasma Sci. 31, 40 (2003).
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