Electrochromic properties of iridium oxide thin films prepared by reactive sputtering in O2or H2O atmosphere-Reference-Cited by-同舟云学术

Electrochromic properties of iridium oxide thin films prepared by reactive sputtering in O2or H2O atmosphere

Published:2015-07 Issue:4 Volume:33 Page:041204
ISSN:2166-2746
Container-title:Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
language:en
Short-container-title:Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena

Author:

Ito Satoshi¹,Abe Yoshio¹,Kawamura Midori¹,Kim Kyung Ho¹

Affiliation:

1. Department of Materials Science and Engineering, Kitami Institute of Technology, 165 Koen-cho, Kitami 090-8507, Japan

Funder

Japan Society for the Promotion of Science (JSPS)

Publisher

American Vacuum Society

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Process Chemistry and Technology,Instrumentation,Electronic, Optical and Magnetic Materials

Link

http://avs.scitation.org/doi/pdf/10.1116/1.4923227

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