Optimization of electrostatic deflectors-Reference-Cited by-同舟云学术

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Optimization of electrostatic deflectors

Published:1995-01 Issue:1 Volume:13 Page:142
ISSN:0734-211X
Container-title:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
language:
Short-container-title:J. Vac. Sci. Technol. B

Author:

Szilagyi M.

Publisher

American Vacuum Society

Subject

General Engineering

Cited by 4 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Synthesis of electrostatic focusing and deflection systems;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1997-11

2. Comment on ‘‘Optimization of electrostatic deflectors’’ [J. Vac. Sci. Technol. B 13, 142 (1995)];Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1996-05

3. Lens and deflector design for microcolumns;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1995-11

4. Synthesis of electrostatic multielectrode deflectors;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1995-09

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