Synthesis of electrostatic multielectrode deflectors
-
Published:1995-09
Issue:5
Volume:13
Page:1988
-
ISSN:0734-211X
-
Container-title:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
-
language:
-
Short-container-title:J. Vac. Sci. Technol. B
Publisher
American Vacuum Society
Subject
General Engineering
Cited by
1 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Synthesis of electrostatic focusing and deflection systems;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1997-11