Electric potential screening on metal targets submitted to reactive sputtering
Author:
Affiliation:
1. Experimental Physics II, Ruhr-University Bochum, Universitystr. 150, 44801 Bochum, Germany
2. Technical and Macromolecular Chemistry, Paderborn University, Warburgerstr. 100, 33098 Paderborn, Germany
Funder
Deutsche Forschungsgemeinschaft (DFG)
Publisher
American Vacuum Society
Subject
Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Link
http://avs.scitation.org/doi/pdf/10.1116/1.4972566
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