Study on bubble defects in roll-to-roll UV imprinting process for micropyramid arrays. I. Experiments-Reference-Cited by-同舟云学术

Study on bubble defects in roll-to-roll UV imprinting process for micropyramid arrays. I. Experiments

Published:2016-03 Issue:2 Volume:34 Page:021201
ISSN:2166-2746
Container-title:Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
language:en
Short-container-title:Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena

Author:

Wu Hao¹,Yi Peiyun¹,Peng Linfa¹,Lai Xinmin²

Affiliation:

1. State Key Laboratory of Mechanical System and Vibration, Shanghai Jiao Tong University, Shanghai 200240, People's Republic of China

2. State Key Laboratory of Mechanical System and Vibration, Shanghai Jiao Tong University, Shanghai 200240, People's Republic of China and Shanghai Key Laboratory of Digital Manufacture for Thin-walled Structures, Shanghai Jiao Tong University, Shanghai 200240, People's Republic of China

Funder

National Natural Science Foundation of China (NSFC)

E-Institutes of Shanghai Municipal Education Commission

Publisher

American Vacuum Society

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Process Chemistry and Technology,Instrumentation,Electronic, Optical and Magnetic Materials

Link

http://avs.scitation.org/doi/pdf/10.1116/1.4941445

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