Line profiles in thick electron resist layers and proximity effect correction
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Published:1979-11
Issue:6
Volume:16
Page:1754-1758
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ISSN:0022-5355
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Container-title:Journal of Vacuum Science and Technology
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language:en
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Short-container-title:Journal of Vacuum Science and Technology
Author:
Phang J. C. H.,Ahmed H.
Publisher
American Vacuum Society
Subject
General Engineering
Cited by
19 articles.
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