Growth of well-oriented InN nanodots by magnetron sputtering with varying sputtering temperature-Reference-Cited by-同舟云学术

Growth of well-oriented InN nanodots by magnetron sputtering with varying sputtering temperature

Published:2018-07 Issue:4 Volume:36 Page:041204
ISSN:2166-2746
Container-title:Journal of Vacuum Science & Technology B
language:en
Short-container-title:Journal of Vacuum Science & Technology B

Author:

Wang Hui¹,Zhao Yang¹,Li Xinzhong¹,Li Jingjie¹,Zhang Ziming¹,Wan Shuai¹,Gu Weizhao¹,Yang Fan²

Affiliation:

1. School of Physics and Engineering, Henan Key Laboratory of Photoelectric Energy Storage Materials and Applications, Henan University of Science and Technology, 263 Kaiyuan Avenue, Luoyang 471003, People's Republic of China

2. Jilin Provincial Key Laboratory of Architectural Electricity and Comprehensive Energy Saving, School of Electrical Engineering and Computer, Jilin Jianzhu University, Changchun 130118, People's Republic of China

Publisher

American Vacuum Society

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Process Chemistry and Technology,Instrumentation,Electronic, Optical and Magnetic Materials

Link

http://avs.scitation.org/doi/pdf/10.1116/1.5028165

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