Interface characteristics of β-Ga2O3/Al2O3/Pt capacitors after postmetallization annealing-Reference-Cited by-同舟云学术

Interface characteristics of β-Ga2O3/Al2O3/Pt capacitors after postmetallization annealing

Published:2021-01 Issue:1 Volume:39 Page:012401
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A
language:en
Short-container-title:Journal of Vacuum Science & Technology A

Author:

Hirose Masafumi¹²,Nabatame Toshihide³^ORCID,Irokawa Yoshihiro²,Maeda Erika¹²,Ohi Akihiko³,Ikeda Naoki²,Sang Liwen³,Koide Yasuo²^ORCID,Kiyono Hajime¹

Affiliation:

1. Shibaura Institute of Technology, 3-7-5 Toyosu, Koto-ku, Tokyo 135-8548, Japan

2. National Institute for Materials Science, 1-1 Namiki, Tsukuba, Ibaraki 305-0044, Japan

3. International Center for Materials Nanoarchitectonics (WPI-MANA), National Institute for Materials Science, 1-1 Namiki, Tsukuba, Ibaraki 305-0044, Japan

Funder

Japan Society for the Promotion of Science

Ministry of Education, Culture, Sports, Science and Technology

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/6.0000626

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