Effect of temperature on Ti and TiN films deposited on a BN substrate-Reference-Cited by-同舟云学术

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Effect of temperature on Ti and TiN films deposited on a BN substrate

Published:1998-05 Issue:3 Volume:16 Page:1901-1906
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Seal S.,Underwood H.,Uda M.,Osawa H.,Kanai A.,Barr T. L.,Benko E.,Krauss A.,Perera R. C. C.

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.581125

Cited by 7 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Development of a technique for the formation of Ti-Al system compounds under the influence of high pressures and temperatures;AIP Conference Proceedings;2024

2. Magnetron co-sputtered μm-thick Mo–Cu films as structural material with low heat extension for key parts of high-power millimeter-band vacuum microelectronic devices;Journal of Vacuum Science & Technology B;2022-01

3. Identification of B-K near edge x-ray absorption fine structure peaks of boron nitride thin films prepared by sputtering deposition;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;2010-09

4. Properties of superhard nc-TiN/a-BN and nc-TiN/a-BN/a-TiB2 nanocomposite coatings prepared by plasma induced chemical vapor deposition;Surface and Coatings Technology;2006-02

5. Cubic boron nitride—Ti/TiN composites: hardness and phase equilibrium as function of temperature;Journal of Alloys and Compounds;2004-11

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