Room-temperature fabrication of hard AlN/TiN superlattice coatings by pulsed laser deposition-Reference-Cited by-同舟云学术

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Room-temperature fabrication of hard AlN/TiN superlattice coatings by pulsed laser deposition

Published:2002-03 Issue:2 Volume:20 Page:430-436
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Pankov V.,Evstigneev M.,Prince R. H.

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.1448511

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3. Optical Properties and Plasmonic Performance of Titanium Nitride;Materials;2015-05-29

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