Current–pressure–voltage characteristics in a planar magnetron discharge-Reference-Cited by-同舟云学术

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Current–pressure–voltage characteristics in a planar magnetron discharge

Published:2003-03 Issue:2 Volume:21 Page:375-380
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Escrivão M. L.,Pereira P. J. S.,Cabral M. H.,Teixeira M. R.,Maneira M. J. P.

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.1539083

Cited by 11 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Structure of DC magnetron sputtering discharge at various gas pressures: a two-dimensional particle-in-cell Monte Carlo collision study;Plasma Sources Science and Technology;2021-05-01

2. Effect of magnetic field on the formation of Cu nanoparticles during magnetron sputtering in the gas aggregation cluster source;Plasma Processes and Polymers;2019-08-07

3. Effect of interelectrode distance on dc magnetron current–pressure characteristics;Journal of Physics: Conference Series;2018-01

4. Current–pressure dependencies of dc magnetron discharge in inert gases;Journal of Physics: Conference Series;2016-11

5. Current-pressure characteristics of dc magnetron discharge for high-rate sputtering;Journal of Physics: Conference Series;2015-11-11

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