Intrinsic stress dependence of c-axis orientation ratio in PbTiO3 thin films deposited by reactive sputtering-Reference-Cited by-同舟云学术

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Intrinsic stress dependence of c-axis orientation ratio in PbTiO3 thin films deposited by reactive sputtering

Published:1997-01 Issue:1 Volume:15 Page:57-61
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Kweon S. Y.,Yi S. H.,Choi S. K.

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.580476

Cited by 23 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

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2. The effect of strain and dead layer on the nonlinear electric-mechanical behavior of ferroelectric thin films;Computational Materials Science;2013-09

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4. Effect of grain orientation in x-ray diffraction pattern on residual stress in polycrystalline ferroelectric thin film;Journal of Applied Physics;2012-08-15

5. Measurement of residual stresses by X-ray diffraction techniques in pyrite films prepared by magnetron sputtering;Materials Research Innovations;2011-10

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