Scanning probe microscopy of deposits employed to image the current density distribution of electron beams
Author:
Publisher
American Vacuum Society
Subject
General Engineering
Cited by 11 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Measurements of current density distribution in shaped e-beam writers;Microelectronic Engineering;2016-01
2. Modified knife-edge method for current density distribution measurements in e-beam writers;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2013-05
3. Related Technologies on Micro-Nanorobotic Manipulation Systems;Micro-Nanorobotic Manipulation Systems and Their Applications;2013
4. Dynamic electrochemical-etching technique for tungsten tips suitable for multi-tip scanning tunneling microscopes;e-Journal of Surface Science and Nanotechnology;2007
5. Dynamic Monte Carlo Simulation on the Electron-Beam-Induced Deposition of Carbon, Silver, and Tungsten Supertips;Microscopy and Microanalysis;2006-10-11
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