Influence of active nitrogen species on high temperature limitations for (0001̱) GaN growth by rf plasma-assisted molecular beam epitaxy
Author:
Publisher
American Vacuum Society
Subject
General Engineering
Cited by 43 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Optical studies of nitrogen plasma for molecular beam epitaxy of InN;Journal of Applied Physics;2020-12-07
2. Molecular Beam Epitaxy of Transition Metal Nitrides for Superconducting Device Applications;physica status solidi (a);2019-11-11
3. RF-plasma MBE growth of epitaxial metallic TaNx transition metal nitride films on SiC;Journal of Vacuum Science & Technology B;2019-05
4. Influence of the atom source operating parameters on the structural and optical properties of In xGa 1 − xN nanowires grown by plasma-assisted molecular beam epitaxy;Journal of Applied Physics;2018-10-28
5. Kinetics of Metal-Rich PA Molecular Beam Epitaxy of AlGaN Heterostructures for Mid-UV Photonics;Molecular Beam Epitaxy;2018
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