Characterization of laboratory plasmas with probes-Reference-Cited by-同舟云学术

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Characterization of laboratory plasmas with probes

Published:1985-05 Issue:3 Volume:3 Page:1059-1066
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Manos D. M.

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.573118

Cited by 24 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

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2. Dynamics of the expansion discharge originated by a dense plasma focus;Journal of Physics: Conference Series;2012-06-19

3. Improved treatment of triple-probe data for determination of electron temperature;Review of Scientific Instruments;2005-11

4. Method and experimental arrangement for Al thin film deposition from r.f. metal plasma with simultaneous self-ion bombardment;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2000-10

5. Microwave Plasma CVD in the System Si-C-H-Ar: Effect of Process Parameters;Chemical Vapor Deposition;1997-06

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