Adhesion measurement of Ti thin films on Si substrate using internal stress in overcoated Ni films-Reference-Cited by-同舟云学术

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Adhesion measurement of Ti thin films on Si substrate using internal stress in overcoated Ni films

Published:1994-01 Issue:1 Volume:12 Page:169-173
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Kondo Ichiharu,Takenaka Osamu,Kamiya Toyoharu,Hayakawa Kaname,Kinbara Akira

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.578915

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3. Calcination Temperature Influence on the Microstructure and the Photocatalytic Properties of TiO₂ Pillared Rectorite;Advanced Materials Research;2011-02

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