1. Nanoelectronics, Faculty of Engineering, Kiel University, 24143 Kiel, Germany
2. Institute of Experimental and Applied Physics, Kiel University, 24098 Kiel, Germany
3. Synthesis and Real Structure, Faculty of Engineering, Kiel University, 24143 Kiel, Germany
4. Kooperation Elmos Semiconductor AG/Frauenhofer-Gesellschaft IMS, 47057 Duisburg, Germany
5. Electrodynamics and Physical Electronics Group, Brandenburg University of Technology Cottbus-Senftenberg, 03046 Cottbus, Germany
6. Institute of Electron Microscopy and Nanoanalysis, Graz University of Technology, 8010 Graz, Austria
7. Graz Centre for Electron Microscopy, 8010 Graz, Austria
8. Department of Micro- and Nanoelectronic Systems, TU Ilmenau, 98693 Ilmenau, Germany