Author:
Benschop Jos P. H.,van Dijsseldonk Anton J. J.,Kaiser Winfried M.,Ockwell David C.
Cited by
13 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. EUV Sources;Handbook of Laser Micro- and Nano-Engineering;2021
2. EUV Sources;Handbook of Laser Micro- and Nano-Engineering;2021
3. Influence of twice-deposited etching mask layers on verticality of nanostructures;Thin Solid Films;2012-09
4. Near-Field Optical Litography;Scanning Probe Microscopy in Nanoscience and Nanotechnology;2009-12-04
5. Lithography and Other Patterning Techniques for Future Electronics;Proceedings of the IEEE;2008-02