Synthesis and structure of chromium nitride films by evaporation in an ammonia plasma
Author:
Publisher
American Vacuum Society
Subject
Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Link
http://avs.scitation.org/doi/pdf/10.1116/1.575591
Cited by 9 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
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2. Using ammonia for reactive magnetron sputtering, a possible alternative to HiPIMS?;Applied Surface Science;2020-02
3. Basic Process of Sputtering Deposition;Handbook of Sputtering Technology;2012
4. Deposition of Compound Thin Films;Thin Film Materials Technology;2004
5. Corrosion behaviors of CrNx and (Ti1−xCrx)N coatings produced by ion plating;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;2001-09
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