Fabrication of double-gated Si field emitter arrays for focused electron beam generation-Reference-Cited by-同舟云学术

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Fabrication of double-gated Si field emitter arrays for focused electron beam generation

Published:1995-09 Issue:5 Volume:13 Page:1968
ISSN:0734-211X
Container-title:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
language:
Short-container-title:J. Vac. Sci. Technol. B

Author:

Itoh Junji

Publisher

American Vacuum Society

Subject

General Engineering

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