Author:
Adhikari Bishwa Chandra,Ketan Bhotkar,Patil Ravindra,Choi Eun Ha,Park Kyu Chang
Abstract
AbstractThe focusing electrode plays an important role to reduce the electron beam trajectory with low dispersion and high brightness. This article summarizes the importance of the vertically aligned multi-walled carbon nanotube effect with the focusing electrode. First of all, the effect of electron beam trajectory is studied with the different heights, hole sizes, and applied voltage of the focusing electrode by the opera 3D simulation. The field emission electron beam spot is captured in the microchannel plate which helps to reduce the signal noise effect and damage of CNT tips by the joule heating effect. The high-dense bright spot is optimized at the focusing electrode hole size of 2 mm, and the height of 1 mm from the gate mesh electrode at the low bias voltage of − 200 V without the loss of current. The FWHM of the electron beam is calculated 0.9 mm with its opening angle of 0.9° which could be applicable in high-resolution multi-electron beam microscopy and nano-focused X-ray system technology.
Funder
Ministry of Trade, Industry and Energy
Publisher
Springer Science and Business Media LLC
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