Standardized procedure for calibrating height scales in atomic force microscopy on the order of 1 nm-Reference-Cited by-同舟云学术

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Standardized procedure for calibrating height scales in atomic force microscopy on the order of 1 nm

Published:1996-05 Issue:3 Volume:14 Page:1228-1232
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Suzuki M.,Aoyama S.,Futatsuki T.,Kelly A. J.,Osada T.,Nakano A.,Sakakibara Y.,Suzuki Y.,Takami H.,Takenobu T.,Yasutake M.

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.580272

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2. Improvement in topology measurement accuracy of atomic force microscope using additional sensor;SPIE Proceedings;2015-07-01

3. High-precision nanoscale length measurement;Nanotechnologies in Russia;2013-07

4. Determination of the nonlinearity of capacitive sensors along the Z-axis of an atomic force microscope;Measurement Techniques;2013-06

5. Isotope Effect of Deuterium Microwave Plasmas on the Formation of Atomically Flat (111) Diamond Surfaces;Japanese Journal of Applied Physics;2012-09-01

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