Optical angular scatterometry: In-line metrology approach for roll-to-roll and nanoimprint fabrication-Reference-Cited by-同舟云学术

Optical angular scatterometry: In-line metrology approach for roll-to-roll and nanoimprint fabrication

Published:2019-09 Issue:5 Volume:37 Page:052904
ISSN:2166-2746
Container-title:Journal of Vacuum Science & Technology B
language:en
Short-container-title:Journal of Vacuum Science & Technology B

Author:

Faria-Briceno Juan J.¹,Zhu Ruichao¹,Sasidharan Vineeth¹,Neumann Alexander¹,Singhal Shrawan²,Sreenivasan S. V.²,Brueck S. R. J.¹

Affiliation:

1. Electrical and Computer Engineering Department, Physics Department, and Center for High Technology Materials, University of New Mexico, Albuquerque, New Mexico 87106

2. NASCENT ERC and Department of Mechanical Engineering, University of Texas at Austin, 10100 Burnet Rd, Austin, Texas 78758

Funder

National Science Foundation

Publisher

American Vacuum Society

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Process Chemistry and Technology,Instrumentation,Electronic, Optical and Magnetic Materials

Link

http://avs.scitation.org/doi/am-pdf/10.1116/1.5119707

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