Localized defect states and charge trapping in atomic layer deposited-Al2O3 films
Author:
Affiliation:
1. BTU Cottbus-Senftenberg, Applied Physics and Sensors, Konrad-Wachsmann-Allee 17, 03046 Cottbus, Germany
Funder
Deutsche Forschungsgemeinschaft (DFG)
Bundesministerium für Bildung und Forschung (BMBF)
Publisher
American Vacuum Society
Subject
Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Link
http://avs.scitation.org/doi/pdf/10.1116/1.4971991
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