Disilane addition versus silane-hydrogen flow rate effect on the PECVD of silicon thin films-Reference-Cited by-同舟云学术

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Disilane addition versus silane-hydrogen flow rate effect on the PECVD of silicon thin films

Published:2016-11 Issue:6 Volume:34 Page:061307
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Dimitrakellis Panagiotis,Amanatides Eleftherios,Mataras Dimitrios,Kalampounias Angelos G.,Spiliopoulos Nikolaos,Lahootun Vanina,Coeuret François,Madec Alain

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.4966957

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1. Superhydrophobic Polymers;Advances in Superhydrophobic Coatings;2023-09-08

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