Author:
Steinberg Christian,Blenskens Daniel,Dhima Khalid,Wang Si,Papenheim Marc,Scheer Hella-Christin,Zajadacz Joachim,Zimmer Klaus
Subject
Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Process Chemistry and Technology,Instrumentation,Electronic, Optical and Magnetic Materials
Cited by
5 articles.
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1. Guiding of LIPSS formation by excimer laser irradiation of pre-patterned polymer films for tailored hierarchical structures;Applied Surface Science;2020-03
2. Low reflection Fresnel lenses via double imprint combined with vacuum-UV surface hardening;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2017-11
3. Flat and highly flexible composite stamps for nanoimprint, their preparation and their limits;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2016-11
4. Nanoimprint-induced orientation of localized wrinkles with SU-8;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2016-11
5. Thermal wrinkling of nanoimprinted SU-8 with masked UV-exposure;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2015-11