Author:
Steinberg Christian,Belgouzi Mhammed,Dhima Khalid,Papenheim Marc,Wang Si,Scheer Hella-Christin
Subject
Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Process Chemistry and Technology,Instrumentation,Electronic, Optical and Magnetic Materials
Cited by
3 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Flat and highly flexible composite stamps for nanoimprint, their preparation and their limits;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2016-11
2. Nanoimprint-induced orientation of localized wrinkles with SU-8;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2016-11
3. Complex 3D structures via hybrid processing of SU-8;Microelectronic Engineering;2016-04