Influence of sticking coefficients on the behavior of sputtered atoms in an argon glow discharge: Modeling and comparison with experiment
Author:
Publisher
American Vacuum Society
Subject
Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Link
http://avs.scitation.org/doi/pdf/10.1116/1.581359
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3. Transition rate diagrams and excitation of titanium in a glow discharge in argon and neon;Spectrochimica Acta Part B: Atomic Spectroscopy;2018-06
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