Ar, N[sub 2], and Cl[sub 2] electron cyclotron resonance plasmas measured by time-of-flight analysis: Neutral kinetic energies and source gas cracking-Reference-Cited by-同舟云学术

Ar, N[sub 2], and Cl[sub 2] electron cyclotron resonance plasmas measured by time-of-flight analysis: Neutral kinetic energies and source gas cracking

Published:1997-07 Issue:4 Volume:15 Page:971
ISSN:0734-211X
Container-title:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
language:
Short-container-title:J. Vac. Sci. Technol. B

Author:

Goodman Rory S.

Publisher

American Vacuum Society

Subject

General Engineering

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