Effect of oxygen plasma treatment on nonalloyed Al/Ti-based contact for high power InGaN/GaN vertical light-emitting diodes-Reference-Cited by-同舟云学术

Effect of oxygen plasma treatment on nonalloyed Al/Ti-based contact for high power InGaN/GaN vertical light-emitting diodes

Published:2013-01 Issue:1 Volume:31 Page:010602
ISSN:2166-2746
Container-title:Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
language:en
Short-container-title:Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena

Author:

Lim Wantae,Sung Youngkyu,Kim Sung-Joon,Shin Young-Chul,Jang Tae-Sung,Park Tae-Young,Kim Gi-Bum,Song Sang-Yeob,Lee Wan-Ho,Kim Yong-Il,Kim Sung-Tae,Pearton Stephen J.

Publisher

American Vacuum Society

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Process Chemistry and Technology,Instrumentation,Electronic, Optical and Magnetic Materials

Link

http://avs.scitation.org/doi/pdf/10.1116/1.4773006

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