Growth, intermixing, and surface phase formation for zinc tin oxide nanolaminates produced by atomic layer deposition-Reference-Cited by-同舟云学术

Growth, intermixing, and surface phase formation for zinc tin oxide nanolaminates produced by atomic layer deposition

Published:2016-02-08 Issue:2 Volume:34 Page:021516
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:J. Vac. Sci. Technol. A

Author:

Hägglund Carl¹,Grehl Thomas²,Tanskanen Jukka T.³,Yee Ye Sheng⁴,Mullings Marja N.³,Mackus Adriaan J. M.³,MacIsaac Callisto³,Clemens Bruce M.⁵,Brongersma Hidde H.²,Bent Stacey F.³

Affiliation:

1. Department of Chemical Engineering, Stanford University, Stanford, California 94305 and Department of Engineering Sciences, Division of Solid State Electronics, Uppsala University, 75121 Uppsala, Sweden

2. ION-TOF GmbH, Heisenbergstraße 15, 48149 Münster, Germany

3. Department of Chemical Engineering, Stanford University, Stanford, California 94305

4. Department of Electrical Engineering, Stanford University, Stanford, California 94305

5. Department of Material Science and Engineering, Stanford University, Stanford, California 94305

Funder

Marcus and Amalia Wallenberg Foundation

Netherlands Organization for Scientific Research

U.S. Department of Energy

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics