Influence of chemical vapor precursor flow rate on the structure and thermal stability of phase-modulated VSiCN/Ag coatings-Reference-Cited by-同舟云学术

Influence of chemical vapor precursor flow rate on the structure and thermal stability of phase-modulated VSiCN/Ag coatings

Published:2021-12 Issue:6 Volume:39 Page:063409
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A
language:en
Short-container-title:Journal of Vacuum Science & Technology A

Author:

Thompson Forest C.¹^ORCID,Kustas Frank M.²,Coulter Kent E.³,Crawford Grant A.¹⁴

Affiliation:

1. Department of Materials and Metallurgical Engineering, South Dakota School of Mines and Technology, 501 E. Saint Joseph St., Rapid City, South Dakota 57701

2. NanoCoatings Inc., 525 University Loop, Suite 114, Rapid City, South Dakota 57701

3. Southwest Research Institute, 6220 Culebra Road, San Antonio, Texas 78238

4. Arbegast Materials Processing and Joining Laboratory, South Dakota School of Mines and Technology, 501 E. Saint Joseph St., Rapid City, South Dakota 57701

Funder

South Dakota Board of Regents

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

https://avs.scitation.org/doi/pdf/10.1116/6.0001302

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