Author:
Buh G. H.,Tran Chi,Kopanski J. J.
Cited by
5 articles.
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1. Investigation of High-k
Dielectric Stacks by C-AFM: Advantages, Limitations, and Possible Applications;Conductive Atomic Force Microscopy;2017-08-16
2. Influence of parasitic capacitances on conductive AFM I-V measurements and approaches for its reduction;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2013-01
3. Characterization of thickness variations of thin dielectric layers at the nanoscale using scanning capacitance microscopy;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2011-01
4. (Invited) Electrical Scanning Probe Microscopy Techniques for the Detailed Characterization of High-k Dielectric Layers;ECS Transactions;2010-04-16
5. Tip-Shape Effect on the Accuracy of Capacitance Determination by Scanning Capacitance Microscopes;Nanoscale Calibration Standards and Methods;2006-03-31